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Message started by aaron_do on Jul 20th, 2007, 12:10am

Title: antenna error
Post by aaron_do on Jul 20th, 2007, 12:10am

Hi all,

how does changing the metal layer fix the antenna error problem? i.e. changing back and forth between metal lines...


thanks,
Aaron

Title: Re: antenna error
Post by didac on Jul 20th, 2007, 12:19am

Hi,
Antenna effect is caused during the etching of the metals. The track "captures" ions that go to the gate oxide. Breaking the track and going one metal up during a short space and the going down again will prevent this effect.
Hope it helps,

Title: Re: antenna error
Post by didac on Jul 20th, 2007, 12:29am

Hi again,
I was thinking that I don't really answer your question. If you think how the IC is fabricated you will see that the foundry maka one layer at time(first ion implantation, then heat to growth...), referring to metals first you have metaln after the etch the oxide growth and you have metaln+1. So if you have a track made in metaln and you break it to prevent antenna, during etching it will atract ions but when the ions arrive at the break they won't find a path to continue because your bridge in metaln+1 will not be fabricated yet.
Hope it helps,

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