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Help: contact via missing when width is increased for poly-silicon resistor. (Read 3231 times)
Jacki
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Help: contact via missing when width is increased for poly-silicon resistor.
Jul 10th, 2014, 2:04am
 
Hi,

   I am blocked by a strange issue in the layout. As shown in the figure below, I try to use poly-silicon resistors to build up my resistive array. When the width W is smaller than 1um, I can get the contact via between poly and metal 1. But when the width of resistor is equal to or larger than 1um, the contact via is missing, instead there is a cross region which is marked by layer "CABAR". The contact via between metal 1 and poly is layer "CA". That means even I cannot add the via by hand in that cross region, or else I cannot pass the DRC check.
   Does anybody have this problem before? Can you please give me some tips to avoid this problem? Anyway this problem is very strange, it is my first to face it.
   Thank you.
   Jacki
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fig.png
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Jacki
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Re: Help: contact via missing when width is increased for poly-silicon resistor.
Reply #1 - Jul 10th, 2014, 8:36am
 
It has been solved. Even the vias are missing, I can still pass LVS. It sounds strange, but it can work.
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boe
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Re: Help: contact via missing when width is increased for poly-silicon resistor.
Reply #2 - Jul 10th, 2014, 9:21am
 
Jacki,
it looks as if the technology uses different layers for contacts and contact arrays.
- B O E
PS: This is just an educeted guess, given that I don't know your tech.
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