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https://designers-guide.org/forum/YaBB.pl Design >> Analog Design >> MIM cap structure https://designers-guide.org/forum/YaBB.pl?num=1189833492 Message started by xwj623 on Sep 14th, 2007, 10:18pm |
Title: MIM cap structure Post by xwj623 on Sep 14th, 2007, 10:18pm Hi All.The MIM cap maze me much that i could't understand it's structure. As the attached MIM, I don't know what "MIM" layer and "VIA4" for,I don't know which are bottom plate and top plate for VIA4 connected the M4 and M5. help me. Thanks. |
Title: Re: MIM cap structure Post by ACWWong on Sep 15th, 2007, 10:10am The structure for MIM is that the bottom plate in M4, the top plate in the MIM metal. You use V4 and M5 to connect to the MIM metal (top plate of MIM). So vertical cross-section would be like this: M5 V4 MIM metal dielectric (oxide or nitride) M4 Your process design kit should include some notes/manual that should explain all these things to you. |
Title: Re: MIM cap structure Post by xwj623 on Sep 15th, 2007, 7:51pm Thanks,ACWWong. I understand., The Kit's manual does't mention MIM. :'( ACWWong wrote on Sep 15th, 2007, 10:10am:
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