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Design >> Analog Design >> low via resistance in tsmc013
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Message started by Vladislav D on Oct 1^st, 2009, 2:43am

Title: low via resistance in tsmc013
Post by Vladislav D on Oct 1^st, 2009, 2:43am

Hello colleagues,
I did the extraction of the via M1-M2 in tsmc 0.13 and got really small resistance. It is about only 1Ohm. Do you think if it can be true or rsistance should be higher? Tnank you

Title: Re: low via resistance in tsmc013
Post by loose-electron on Oct 2^nd, 2009, 9:52am

Via resistance in all processes changes a huge amount over foundry wafer lots from the exact same foundry and process.. If it is nominally 1 ohm, the expectation of it to change from 0.5 ohms to 2-5 ohms should be designed for.

Safe premise: Always use enough via connections that the resistance of the vias is not enough to affect the design.

Bottom Line: lots of vias in parallel

Title: Re: low via resistance in tsmc013
Post by Vladislav D on Oct 4^th, 2009, 12:53pm

Thank you for the answer. I just didn't expect that even the typical resistance could be so low.

Title: Re: low via resistance in tsmc013
Post by loose-electron on Oct 4^th, 2009, 2:57pm

Low is a matter of perspective. To someone putting large currents in an IC, the resistance of the layer change has been very problematic.

Via interconnects have been an issue with high current power transistors, RF power amps, H bridge motor drivers and other areas.