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Design >> Analog Design >> Silicidation
https://designers-guide.org/forum/YaBB.pl?num=1264738700

Message started by siddhartha .k on Jan 28^th, 2010, 8:18pm

Title: Silicidation
Post by siddhartha .k on Jan 28^th, 2010, 8:18pm

Hi..How Silicide Or Silicidation process is don in tsmcN65 or in any nm technology

Title: Re: Silicidation
Post by raja.cedt on Jan 28^th, 2010, 8:25pm

hi,
i didn't understand your intension behing the question...if you want process clearly then any decent text book is the better.

Thanks,
rajasekhar,

Title: Re: Silicidation
Post by sheldon on Jan 29^th, 2010, 3:04am

???,

Do you mean salicidization, that is, creating a salicide layer
in order to contact silicon or polysilicon?

Best Regards,

Sheldon

Title: Re: Silicidation
Post by Mayank on Jan 29^th, 2010, 4:26am

Hi,
Read this :--- http://www.designers-guide.org/Forum/YaBB.pl?num=1261313903/0#6

for further info, refer your DRM.

--
Mayank.

Title: Re: Silicidation
Post by sheldon on Jan 30^th, 2010, 5:15am

Second Try,

I am not sure what question is being asked could you clarify
what you would like to know.

1) Do you want to know what silicidation is?
2) Do you want to know if the foundries 65nm has polysilicon resistors,
silicided resistors, or both?
3) Do you want to know how contact to silicon is formed?
4) Do you want to know the foundry process recipe?
5) Was there something else that you wanted to ask?

Best Regards,

Sheldon

Title: Re: Silicidation
Post by loose-electron on Jan 30^th, 2010, 11:34am

Mayank wrote on Jan 29^th, 2010, 4:26am:

Hi,
Read this :--- http://www.designers-guide.org/Forum/YaBB.pl?num=1261313903/0#6

for further info, refer your DRM.

--
Mayank.

Yes - covered before in an earlier discussion