The Designer's Guide Community Forum

The Designer's Guide Community Forum
https://designers-guide.org/forum/YaBB.pl
Design >> Analog Design >> ion implantation for Vth adjustment
https://designers-guide.org/forum/YaBB.pl?num=1112066624

Message started by analogic on Mar 28^th, 2005, 7:23pm

Title: ion implantation for Vth adjustment
Post by analogic on Mar 28^th, 2005, 7:23pm

it is said in some book that "ion implantation for Vth adjustment" is done after the growth of gate oxide. is it true? will it degrade the quality of the gate oxide? Thanks.

Title: Re: ion implantation for Vth adjustment
Post by DReynolds on Mar 29^th, 2005, 7:30am

Analogic, ion implantation is done several times in .13um to adjust threshold (among other things). You can get normal vt, low vt and native devices..... no, it doesn't hurt the quality of the gate oxide. If you use the lower vt or native devices, be careful to understand how much they can vary before you commit to using them.

David Reynolds