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Measurements >> Other Measurements >> Emmission Microscope (EMMI)
https://designers-guide.org/forum/YaBB.pl?num=1230282170

Message started by ywguo on Dec 26^th, 2008, 1:02am

Title: Emmission Microscope (EMMI)
Post by ywguo on Dec 26^th, 2008, 1:02am

Hi,

Do you know what is the lowest current limit that EMMI can detect? Does it depend on the substrate material, the source/drain diffussion? Any literature on EMMI is welcome. Thank you.

Yawei

Title: Re: Emmission Microscope (EMMI)
Post by Tlaloc on Jan 27^th, 2009, 8:09pm

A lot of it depends on the base material. I know of a 0.6um or 0.8um technology with 1 lvl metal that was able to differential differences in 10's of uA to 100uA. With the tighter pitches and more metals, there is a lot more chances for reflection of the emissions on the metal layers. With three or four levels I don't expect to find anything until I have at least 1mA, and really four levels makes things iffy. Anything higher, and most designers that I know don't ever expect to find anything with top-side EMMI. That's when bottom-side starts coming into play, but it is a whole lot harder to setup.