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Other CAD Tools >> Physical Verification, Extraction and Analysis >> Why check Antenna for MIM caps?
https://designers-guide.org/forum/YaBB.pl?num=1308323751

Message started by ywguo on Jun 17^th, 2011, 8:15am

Title: Why check Antenna for MIM caps?
Post by ywguo on Jun 17^th, 2011, 8:15am

Hi Guys,

I find that there are much more DRC rules for Ultra Deep Submicron technology. For example, it checks antenna for MIM caps. I don't know why. Why do we need to check antenna for UDSM technology? Saying 65nm.

Thanks in advance.
Yawei

Title: Re: Why check Antenna for MIM caps?
Post by harpoon on Jul 28^th, 2011, 1:41pm

I see this in 0.13um as well. I guess it must be that the floating plates of the MIM between the metal stack can be damaged very easily (very thin), like the gate of FETs. This was for a high density single layer 4fF/um^2 cap.