Hi everyone.
Can anyone able to provide me the standard deviations of few process parameters (such as TOXe (electrical tox), Ndep (depletion conentration), Length, Width for both nmos and pmos) of any technology (such as b/w 16nm to 90nm) real or demo PDK. I would like to see the behavior of sigma if it is increasing or shrinking with technology nodes. or refer any research paper having a figure/plot of Standard deviation of Tox vs Technology nodes?
Thank you.