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poly orientation in lay-out (Read 2894 times)

Mayank

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Re: poly orientation in lay-out
Reply #15 - Feb 02^nd, 2010, 6:26am

Hi Berti,
Quote:

But for advanced processes (45nm and below) quite different transistor behavior (�20%) has been reported depending on the transistor orientation (related to the orientation of the crystal lattice of substrate).

Generally 111 lattice orientation is considered the best substrate orientation to align the transistor channel. The stress and atom density is least along this direction, hence increased mobility.
I think we just need to align transistor directions in layout. Fabricator himself takes care to fab it in that alignment.

--
Mayank.

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Berti

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Re: poly orientation in lay-out
Reply #16 - Feb 2^nd, 2010, 7:04am

Hi Mayank
Quote:

Generally 111 lattice orientation is considered the best substrate orientation to align the transistor channel.

I think in most recent technologies people switched to <100> ...

Quote:

Fabricator himself takes care to fab it in that alignment.

Sure, but in a typical SoC not all the transistors have the same orientation?
Should that design practice be reconsidered for <65nm or do DRC/DFM not even allow different poly orientations?

Cheers

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