From the above discussions, i guess u r sampling the input at the bottom plate of the DAC.
Are u using any buffer to drive the DAC ?? If not that could be an issue here. A rail-2-rail sample and hold usually needa a buffer to drive large DAC. Parasitic capacitance is not a big issue in the design of SAR ADCs, if it doesn't take part in charge redistribution.
Then 200fF parasitic capacitance seems a very big number for me for 100fF capacitance to settle in 1us. I will really ask you to look into the numbers once again
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Which technology node r u using ??
U can also design switch taking into consideration the effect parasitics added by it into settling consideration. Just make sure accessible node of parasitic capacitance is always at ac ground during charge redistribution. All u need to worry about is driving this total capacitance during sampling operation which will ask for a buffer.