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Random doping fluctuation and Line Edge Roughness modeling in atlas silvaco (Read 2869 times)
sharif
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Random doping fluctuation and Line Edge Roughness modeling in atlas silvaco
Jun 15th, 2011, 1:47am
 
Hello Hall,

I want do simulation RDF and LER of MOSFET in Silvaco. How can I change the doping and surface without stoping the simulation?
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