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Metal gate (Read 3104 times)
GaAs_si
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sandy
Metal gate
Sep 22nd, 2011, 9:00am
 
Hai
Why Pmos have metal gate why not nmos in tsmc28nm HPL Technology ? Undecided
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raja.cedt
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Re: Metal gate
Reply #1 - Sep 22nd, 2011, 9:02am
 
hello,
it is very difficult to say, only foundary can say....
Thanks,
Raj.
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harpoon
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Re: Metal gate
Reply #2 - Sep 23rd, 2011, 9:02am
 
I am guessing that if both pmos and nmos gates are used, you will need 2 different types of "metal".

as a result,

it could be more complicated to qualify/stabilize the process (e.g. more variables to control) ?

or cost maybe ?

in any case ... I am also curious to know ... what does the foundry say ?
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raja.cedt
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Re: Metal gate
Reply #3 - Sep 23rd, 2011, 9:34am
 
hello harpon,
no need to use two types of metals, because of work function difference if you use same metal you will get different Vth any how it is already with normal cmos process also.

Thanks.
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harpoon
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Re: Metal gate
Reply #4 - Sep 23rd, 2011, 1:11pm
 
The different vth is the reason I am suggesting two metal, i.e. If the foundry uses metal gates on both nmos and pmos ... AND want to keep vth the same, then they need two types of metal.

So why then ... Hmmnnn ...
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RobG
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Re: Metal gate
Reply #5 - Sep 23rd, 2011, 3:25pm
 
I have no idea, but I remember reading a bit about the subject of metal gates in Spectrum. The hi-K devices need them for some reason. Click Here to get to some of the articles. Maybe the articles will jar someone's memory.

rg
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