Dear All,,
I am trying to create a model of a MEMS switch in Verilog-A. I saw an example of Verilog-A MEMS switch model on this website which is applicable to a parallel plate capacitor MEMS.
http://www.designers-guide.org/VerilogAMS/mems-models/OHMIC_CANTILEVER_RF_MEMS_S...I have a MEMS design that is not a parallel plate capacitor device. I have simulated this device in ANSYS (good for transient MEMS simulation). From the ANSYS simulations I have the transient response of the MEMS structure i.e displacement vs time in the form of
z = A*t^2+B*t
where z is the displacement and t is the time.
I want to use this response function in the Verilog-A design but I don't know how to modify the non-linear state space equations for Pos(z) and Pos(velocity) for the above transient response.
Pos(velocity) is pretty straight forward I think and I could use the same one as given in the example (link above), i.e.
Pos(velocity):ddt(Pos(z))==Pos(velocity);
But I can't think of a way to express Pos(z); I tried something along the lines of the following:
Pos(z):idt(Pos(velocity),ic)==A*pow((Pos(z)/Pos(velocity)),2) + B*(Pos(z)/Pos(velocity));
The logic behind the above equation is t = Pos(z)/Pos(velocity)
Would anyone have any idea how to plug in the transient response into the state space equations?
I would really appreciate your help.
Many thanks,
Sunil.