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Silicon on Insulator deep trench Isolation (Read 75 times)

aaron_do Senior Fellow Offline Posts: 1398	Silicon on Insulator deep trench Isolation May 10^th, 2012, 6:36pm Hi all, just wondering, for Silicon-on-Insulator technology, does a deep trench in combination with the buried oxide give perfect DC isolation? In other words, does the deep trench extend all the way to the buried oxide and prevent any leakage current? thanks, Aaron
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loose-electron Senior Fellow Offline Best Design Tool = Capable Designers Posts: 1638 San Diego California	Re: Silicon on Insulator deep trench Isolation Reply #1 - May 12^th, 2012, 8:40am go get some specifics on the foundry process - The SOI variants do a lot better than the DT isolation of bulk silicon, but you need the specifics of the foundry process.
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