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typical inductance variation of on-chip inductor (Read 3584 times)
aaron_do
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typical inductance variation of on-chip inductor
Jan 02nd, 2007, 10:54pm
 
Hi all,

can anyone tell me the typical inductance and Q variation of an on-chip inductor. For example a 5 turn top metal spiral inductor with a 100um core,  10 um width and 2um thickness...any good references?

thanks,
Aaron
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ACWWong
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Re: typical inductance variation of on-chip induct
Reply #1 - Jan 3rd, 2007, 3:00am
 
Generally inductance varies very little as it is lateral geometry (total enclosed area & turns) based. I've used kits were worst case L variation was something like 1~2%.
What does vary is Q and SRF. Q can change by about 20%~30% but depends on your frequency of operation (skin loss versus metal R loss, parasitic C value & quality due to ~20% delta on oxide thicknesses and shield/sub impedance variation). I normally design with worst case Q in mind.
As for references.... your pdk/foundry should be the starting point..
cheers
aw
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aaron_do
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Re: typical inductance variation of on-chip induct
Reply #2 - Jan 3rd, 2007, 5:05pm
 
thanks aw

Aaron
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