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RSCE (Read 1207 times)
sivacharan
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RSCE
Jan 10th, 2007, 11:14pm
 
Can any one explain simply the physics behind the Reverse Short Channel Effect??

Thanks.
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Geoffrey_Coram
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Re: RSCE
Reply #1 - Jan 11th, 2007, 11:45am
 
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If at first you do succeed, STOP, raise your standards, and stop wasting your time.
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mc66
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Re: RSCE
Reply #2 - Jan 13th, 2007, 3:22am
 
it's because halo implant,which is use to prevent punch through

when L decrease,and before SCE take effect,the halo implant will make the effect doping of sub rise,so vt rise
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Croaker
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Re: RSCE
Reply #3 - Jan 15th, 2007, 4:40pm
 
mc66 wrote on Jan 13th, 2007, 3:22am:
it's because halo implant,which is use to prevent punch through

when L decrease,and before SCE take effect,the halo implant will make the effect doping of sub rise,so vt rise


Perhaps I can clarify...and see if I understand...

There is a p-type halo implant around the s/d.  This high p-doping decreases the width of the depletion region, thus making it harder for the depletion regions of the s/d to touch, which is important when the channel is short.  

For long-channel devices, the halo implant is a pretty insignificant portion of the p-type substrate doping.  As the channel shrinks, more of the channel consists of this high p implant, and thus the threshold voltage increases (the charge concentration is higher).

Makes sense to me.   Smiley
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mc66
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Re: RSCE
Reply #4 - Jan 17th, 2007, 4:42am
 
Croaker wrote on Jan 15th, 2007, 4:40pm:
Perhaps I can clarify...and see if I understand...
..............................................................

Makes sense to me.   Smiley


you are right,and express clearly.i'm chinese,so express something use english is difficult to me
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Croaker
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Re: RSCE
Reply #5 - Jan 17th, 2007, 6:30am
 
No problem.
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