Hi..How Silicide Or Silicidation process  is don in  tsmcN65  or in any nm technology

???,

  Do you mean salicidization, that is, creating a salicide layer
in order to contact silicon or polysilicon?

                                                         Best Regards,

                                                             Sheldon

Second Try,

  I am not sure what question is being asked could you clarify
what you would like to know.

1) Do you want to know what silicidation is?
2) Do you want to know if the foundries 65nm has polysilicon resistors,
   silicided resistors, or both?
3) Do you want to know how contact to silicon is formed?
4) Do you want to know the foundry process recipe?
5) Was there something else that you wanted to ask?

                                                        Best Regards,

                                                           Sheldon