Tiger
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thanks a lot, rfcooltools.com yes, it is a problem about the reliability . i have checked out this kind of layout for digital circuit, and it is acceptable. also, i view the standard rf Mosfet provided by the foundry. Though two poly contcact ared used to connect poly and metal1, it just uses only one via connecting the metal1 to metal2, from which the signal feed into the mosfet. So, i think the process provied by foundry is reliable, and this layout is acceptable.
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