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xwj623 Community Member Offline Posts: 36	MIM cap structure Sep 14^th, 2007, 10:18pm Hi All.The MIM cap maze me much that i could't understand it's structure. As the attached MIM, I don't know what "MIM" layer and "VIA4" for,I don't know which are bottom plate and top plate for VIA4 connected the M4 and M5. help me. Thanks.
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ACWWong

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Posts: 539
Oxford, UK

Re: MIM cap structure
Reply #1 - Sep 15^th, 2007, 10:10am

The structure for MIM is that the bottom plate in M4, the top plate in the MIM metal. You use V4 and M5 to connect to the MIM metal (top plate of MIM).

So vertical cross-section would be like this:

M5
V4
MIM metal
dielectric (oxide or nitride)
M4

Your process design kit should include some notes/manual that should explain all these things to you.

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xwj623

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Posts: 36

Re: MIM cap structure
Reply #2 - Sep 15^th, 2007, 7:51pm

Thanks,ACWWong. I understand.,
The Kit's manual does't mention MIM. Cry

ACWWong wrote on Sep 15^th, 2007, 10:10am:

The structure for MIM is that the bottom plate in M4, the top plate in the MIM metal. You use V4 and M5 to connect to the MIM metal (top plate of MIM).

So vertical cross-section would be like this:

M5
V4
MIM metal
dielectric (oxide or nitride)
M4

Your process design kit should include some notes/manual that should explain all these things to you.

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