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The Designer's Guide Community Forum › Other CAD Tools › Physical Verification, Extraction and Analysis › Why check Antenna for MIM caps?
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Why check Antenna for MIM caps? (Read 3288 times)
ywguo
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Why check Antenna for MIM caps?
Jun 17th, 2011, 8:15am  
Hi Guys,

I find that there are much more DRC rules for Ultra Deep Submicron technology. For example, it checks antenna for MIM caps. I don't know why. Why do we need to check antenna for UDSM technology? Saying 65nm.

Thanks in advance.
Yawei
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harpoon
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Re: Why check Antenna for MIM caps?
Reply #1 - Jul 28th, 2011, 1:41pm  
I see this in 0.13um as well. I guess it must be that the floating plates of the MIM between the metal stack can be damaged very easily (very thin), like the gate of FETs. This was for a high density single layer 4fF/um^2 cap.
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