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› Why check Antenna for MIM caps?
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Why check Antenna for MIM caps? (Read 3287 times)
ywguo
Community Fellow
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Posts: 943
Shanghai, PRC
Why check Antenna for MIM caps?
Jun 17
th
, 2011, 8:15am
Hi Guys,
I find that there are much more DRC rules for Ultra Deep Submicron technology. For example, it checks antenna for MIM caps. I don't know why. Why do we need to check antenna for UDSM technology? Saying 65nm.
Thanks in advance.
Yawei
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harpoon
Senior Member
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Posts: 112
Hampshire
Re: Why check Antenna for MIM caps?
Reply #1 -
Jul 28
th
, 2011, 1:41pm
I see this in 0.13um as well. I guess it must be that the floating plates of the MIM between the metal stack can be damaged very easily (very thin), like the gate of FETs. This was for a high density single layer 4fF/um^2 cap.
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