Hi,

I have a problem I have to solve and I am stuck  It is

A nMOSFET has HfO2 as gate oxide ((Εox )/(Ε0 ) = 16, Tox = 10 nm) and a doping concentration Na = 10^17 cm^-3 in the body. The gate material is TiN ( Φm = 4.61 eV ). Calculate Vt.

I have come to the conclusion that Vt = Vfb + Φst - Qdep/Coxe , but how do I find Qdep? And is Φst the same as Φm?

Thank you in advance!