Horror Vacui
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What is accuracy? It seems an impossible mission in the light of process variations and local mismatches.
Though if you need a delay line with 1ps resolution, which will be calibrated to a reference, then sure it is possible. The delay can be in multiple ways even in the simplest CMOS inverter. The delay is sensitive to the supply voltage, backgate voltages of the transistors, current starving can be used, etc.
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